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Solutions for Success

Applications

SAP 100

 

SAP 100

Application

Photosensitive and non-photosensitive hard mask enables through-silicon-via (TSV) formation for 3-D integration and advanced packaging.

Properties

Ultra-high etch selectivity for via etch; thin layer spin-on solution; wide process window suitable for various process schemes; easy strip and clean; compatible with existing technology.

Advantages

Provides hard mask user desired replacement with low material usage high etch selectivity alternative; Enables higher aspect ratio, smaller feature deep via etch for current and future generation technology nodes IC packaging; Low Cost-of-Ownership.

 

SAP 200

SAP 100

 

Application

Photosensitive dielectrics for wafer level, redistribution and solder bumping dielectrics applications for advanced packaging

Properties

Low curing temperature (175C - 190 C); High resolution, negative tone and TMAH developable; Excellent adhesion strength; Low shrinkage and low stress resulting in higher yield.

Advantages

Enables thinned wafer usage with low temperature packaging processes; Minimum thermal mismatch; Competitive cost