Products 
SC Series | SD Series | SG Series | SK Series | ST Series | SX Series
SG 200 planarizing coating filling a 100 nm wide, 650 nm deep trench (CVD TEOS SiO2)
SG Series
Application
Sub-Al IMD, BPSG leveling, partial and total etchback planarization, masking and other sacrificial applications
Properties
Low cost, gap-fill and planarizing dielectric layer