Products SC Series | SD Series | SG Series | SK Series | ST Series | SX Series

SK Series

Application

Ultra low-k IMD, devices requiring low refractive index films

Properties

k ~ 2.2 to 2.6, small pore size (diameter< 1.5 nm) and narrow size distribution, short pore interconnect length, good mechanical properties, low RI, UV curable, stable to moisture uptake